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Semicon Handling system

Memory test handler

PK5511

Memory test handler

FEATURES

  • Memory test handling
  • Function : SEM horizontal sample preparation(Dicing, polishing etc.)
  • Target device : Sample wafer

SPECIFICATION

Chamber Inner Size 500mm x 386mm x 216mm
Temperature Range -40˚C ~ 150 ˚C (±3 ˚C)
Docking mode Horizontal docking
TCU Heater Power 1600W
Load cell 500kg (0.1% R.O.)
Surface Temperature 60˚C
Up-Down Stroke 350mm (For Maintenance)
Weight 400kg
Handler Stacker OK, NG (20Tray Stack) / 2 Loading (10 Tray Stack) / Empty (5 Tray Stack)
Picker 4 Picker
Buffer 4 Place, 90 ˚ Rotate
Dry Unit Temperature 200W, 60 ˚C
T Tray Flow 2 T tray Transfer Cross
System Layout External Dimension (W*L*H) 1050mm(W) x 1850mm(D) x 2300m(H)
System Weight Approximately 1500kg
Utility Power AC220V ± 10% (50/60Hz), Phase, 7.6Kw, 20A
Dry Air 5~6kgf/cm², (Ø12mmx 2EA Fitting)